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Micro force sensor

Micro force in μN (mgf) can be detected and measured. The light and compact body can be easily handled and assembled into a device.

THK Precision Co., Ltd.
  High load sensor

100N load can be detected with high resolution. Optimal for force measurement of precision machining and precision press, etc.

THK Precision Co., Ltd.
Sensor amplifier

Common low noise amplifier for “Micro Force Sensor” and “High Load Sensor”.

THK Precision Co., Ltd. 
Technical Information

Mechanistic principle Displacement under a micro force on the sensing parts supported by an elastic hinge guide is measured by a high-resolution capacitive sensor.

Measurement date examplesiple


Multiple inspection weights with prescribed loads are placed on the force sensor to measure the output voltage relative to the weight and obtain the sensitivity coefficient(V/N).


Sensitivity line of the sensor output and measured load difference are expressed in percent of the sensor voltage for the rated load. The largest absolute values of positive and negative errors are taken and represented as “±**% or below “.


Load or displacement equivalent to the resolution is given to check that the steps of the sensor output voltage is recognizable.

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