Mechanism of Stage
“Coarse movement feeding in millimeter ” and “fine movement feeding in nanometer” are possible.
Achieve long travel distance and high resolution concurrently.
Principles of movement
Rough motion and fine motion operation principle
(1) The piezo-electric element is slowly elongated and the trolley table advances.
(2) The piezo-electric element is abruptly shrunk and the friction part slides to move.
Repeat (1) and (2) above for rough motion in mm
(3) DC voltage is applied to the piezo-electric element for high precision positioning to the target position.
Even after stopping, linear scale signals are fed back to maintain the position control.