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Ultrasonic Motor Stage

A high precision stage that can control positioning with as high resolution as 20 nm in a stroke range of several tens of mm.

THK Precision  Co., Ltd.


A controller dedicated to the Ultrasonic Motor Stage with built-in driver and linear scale input circuit.

THK Precision  Co., Ltd.

Technical Information

Mechanism of Stage

“Coarse movement feeding in millimeter ” and “fine movement feeding in nanometer” are possible. Achieve long travel distance and high resolution concurrently.

Principles of movement

Rough motion and fine motion operation principle

(1) The piezo-electric element is slowly elongated and the trolley table advances. (2) The piezo-electric element is abruptly shrunk and the friction part slides to move. Repeat (1) and (2) above for rough motion in mm (3) DC voltage is applied to the piezo-electric element for high precision positioning to the target position. Even after stopping, linear scale signals are fed back to maintain the position control.

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