■Slip Finder "MATS"

YIS-50HM (High Magnification MM) is a part of SLIP FINDER SYSTEM to detect slip lines on EPI wafers. Automated slip detection is performed by our proprietary software. Output data will acquire 10mm x 10mm FOV and report number of slip lines, length of slip lines and position of each slip line on the inspected wafer.

■Slip Finder "300HM"

It is equipped with YIS-50HM and is capable of inspecting the entire 300mm wafer for slip lines. It comes with two FOUPs and two robots and comes with edge grip end effector. Slip Finder software reports, number of slip lines, position of each slip line and length of each slip line.


Automated Slip Line Detection

Option: Image printer and image storing device