New series of piezo stage with a built-in strain gauge sensor.
Excellent position reproducibility with a high-resolution as 50nm and feedback control.
Although this is a reasonable model, these stages have a characteristics such as high-speed response of piezo stage.
Line Up
| X axis |
| Model No. | PS1L60-200U-S |
|---|---|
| Travel range | 200μm |
| Resolution | 50nm |
| Repeatability | ±50nm |
| Pitching/Yawing/Rolling | 2″ / 3″ / 2″ |
| Load capacity | 5 N |
| Resonant freq. | 280Hz |
| Stiffness | 2.0μm/N |
| Linearity | ±0.2 % |
| Dimensions | 60×60×26[mm] |
| Weight | 250 g |
| Body material（Surface treatment） | Aluminum(Black alumite) |
| Z axis |
| Model No. | PSVL60-200U-S |
|---|---|
| Travel range | 200μm |
| Resolution | 50nm |
| Repeatability | ±50nm |
| Pitching/Yawing/Rolling | 2″ / 2″ / 2″ |
| Load capacity | 5 N |
| Resonant freq. | 230Hz |
| Stiffness | 2.2μm/N |
| Linearity | ±0.2 % |
| Dimensions | 60×60×30mm |
| Weight | 300 g |
| Body material（Surface treatment） | Aluminum(Black alumite) |
| XY axes |
| Model No. | PS2L80-200U-S |
|---|---|
| Travel range | (XY) 200 μm |
| Resolution[nm] | (XY) 50 nm |
| Repeatability [nm] | (XY) ±50 nm |
| Pitching/Yawing/Rolling | 2″ / 3″ / 2″ |
| Load capacity | 10 N |
| Resonant freq.[Hz] | 100 Hz |
| Stiffness | 2.15 μm/N |
| Linearity | ±0.2 % |
| Dimensions | 80×80×25 mm |
| Weight | 350 g |
| Body material（Surface treatment） | Aluminum(Black alumite) |
| Objective lens focusing stage |
| Model No. | PFHW**-200U-S |
|---|---|
| Travel range | 200 μm |
| Resolution | 50 nm |
| Repeatability | ±50 nm |
| Pitching/Yawing/Rolling | 3″ / 2″ / 3″ |
| Applicable thread dia. | M20.32 / M25 / M26 / M32 |
| Resonant freq. | 180 Hz |
| Stiffness | 2.2μm/N |
| Linearity | ±0.2 % |
| Dimensions | 74×60×25 mm |
| Weight | 200 g |
| Body material（Surface treatment） | Aluminum(Black alumite) |
