Stages for “Objective Lens Focusing” are exclusively designed for focusing of objective lens.
Being integrated in a microscope or inspection/measurement and observation devices, they can speed-up lens focusing and improve the accuracy.

 

 

 

3 types are available

Horizontal type Vertical type Box type
It may move up and down even with the thin body part. There is also a variety of stroke types. This type has a high rigidity and responsive structure. This is suited for applications with heavy lens or requiring high-speed focusing. This type has an object center impeller structure centered at the objective lens.
This is suited for integration into manufacturing/inspection devices.

Applications

•High-speed focusing
•Semiconductor & FPD inspections
•Laser processing
•Confocal microscopes
•Image processors
•Interferometer shape measurement

Line Up

Horizontal type

 

Model No. Travel range
[μm]		 Resolution
[nm]		 Repeatability
[nm]		 Resonant freq.
[Hz]		 Applicable
thread dia
PFHC**-015U
PFHW**-015U		 15 1 ±1 950
680		 M20.32×0.706
M25×0.75
M26×0.706
M32×0.75
(※)
PFHC**-100U
PFHW**-100U		 100 2 ±2 520
430
PFHW**-200U 200 5 ±5 370
PFHW**-300U 300 10 ±10 300
PFHW**-400U 400 20 ±20 240

※For thread sizes other than those listed above, please contact us.

 
Vertical type

 

Model No. Travel range
[μm]		 Resolution
[nm]		 Repeatability
[nm]		 Resonant freq.
[Hz]		 Applicable
thread dia
PFVC**-100U
PFVW**-100U		 100 2 ±2 1000
750		 M20.32×0.706
M25×0.75
M26×0.706
M32×0.75
(※)

※For thread sizes other than those listed above, please contact us.

 
 
Box type

 

Model No. Travel range
[μm]		 Resolution
[nm]		 Repeatability
[nm]		 Resonant freq.
[Hz]		 Applicable
thread dia
PFB*-030U 30 1 ±1 3100 M20.32×0.706
M25×0.75
M26×0.706
(※)
PFB*-100U 100 2 ±2 490
PFB*-300U 300 10 ±10 210

※For thread sizes other than those listed above, please contact us.